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ULVAC offers technical solutions for the production of power devices.
ULVAC is the industry leader in the delivery of systems for SiC and Si.

SiC

Si

High-temp シャッフルカジノ 入金不要ボーナスplanter for SiC
IH-860DSIC

IH-860DSIC is high-volume and high temperature system specifically suited for the SiC industry.

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IH-シャッフルカジノ 入金不要ボーナスSIC

Load-lock type シャッフルカジノ 入金不要ボーナス
CS-200

シャッフルカジノ 入金不要ボーナス CS 200 is for research & development and small production application.

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CS-200

Dry Etching System for Production

Multifilm Dry Etching sytem designed for high volume manufacturing. Flexible configuration with low cost of ownership.

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NE-5700/NE-7800

Ashing Systems
シャッフルカジノ 入金不要ボーナスtemsシャッフルカジノ

NA series ashing system is a multi-substrate flexible ashing system which can be used for next generation and wafer level packaging processes.

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Luminous シャッフルカジノ 入金不要ボーナス

Cluster-type Sputtrering System
SME-200E

Cluster type system which can be used for various types of deposition.(Metal, PZT,BST, AIN, SiNx,AI203)
Supports transfer chamber and various types of depositions.

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SME-200E

Batch-type High Vacuum Evaroration System
シャッフルカジノ 入金不要ボーナスh VacuumEvaporation

シャッフルカジノ 入金不要ボーナスeries is a high vacuum evaroration system for the deposition of metal and oxide on a substrate.
Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.

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シャッフルカジノ 入金不要ボーナスeries

Medium Current シャッフルカジノ 入金不要ボーナスplanter
Medium Current

The SOPHI-260 system is built upon existing medium シャッフルカジノ 入金不要ボーナスplanter technology. However, the system has been designed to reduce cost and still provide a high-quality system with parallel scan capability.

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SOPHI-200/260

High-energy シャッフルカジノ 入金不要ボーナスplanter
SOPHI-400

SOPHI-400, cluster type high-energy シャッフルカジノ 入金不要ボーナスplanter, has no mass separator and supports thin wafers.

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SOPHI-400

Low-acceleration and High-density シャッフルカジノ 入金不要ボーナスplanter
SOPHI-30

SOPHI-30, low-acceleration and high-density シャッフルカジノ 入金不要ボーナスplanter, is cluster type and supports thin wafers.

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SOPHI-30

Backside Metalization シャッフルカジノ 入金不要ボーナス
SRH Series

SRH Series is a high volume PVD system for the deposition of metallic films required in the power device, WL-CSP, UBM or similar applications.

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SRH Series
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