ULVAC launches "uGmni series", シャッフルカジノ トークンingle-wafer film deposition and processing system for advanced electronics manufacturing, customizable with a variety of modules that can be equipped onto the common transfer core

ULVAC, Inc. (or "ULVAC", based in Chigasaki, Kanagawa JAPAN; CEO Setsuo Iwashita) today announced to launch "uGmni series", シャッフルカジノ トークンingle-wafer system for thin film deposition and processing. The cluster type system can be equipped with a variety of process modules such as sputtering and etching onto its common transfer core.

As manufacturing of advanced electronics uses a wide variety of processes such as film deposition and fine patterning, commonly, each process uses シャッフルカジノ トークンpecific system designated for such process.

The versatile "uGmni series" platform can equip a variety of process modules, improving efficiency in the manufacturing process. It also utilizes common parts to reduce spare parts, along with using the same operation panels to improve usability.

Overview of the uGmni series

［Features］

・Able to combine various process chambers: sputtering, etching, ashing and PE-CVD
　*Certain combinations may be unavailable depending on the process, so please consult with us.

・All above modules to be manufactured by ULVAC
・Compatible with wafers up to Φ300 ㎜

［Applications］
・Power device: seed and metal layer sputtering
・MEMS sensor: PZT sputtering and etching
・Optical device: VCSEL etching
・Packaging: descum ashing
・Communication device: PE-CVD of insulated film and etching

［Applicable wafer size］
　uGmni-200 series　MaxΦ200mm
　uGmni-300 series　MaxΦ300mm

［Transfer core］for Φ200 mm, please inquire for Φ300 mm
　Square: maximum 2 process modules
　Hexagon: maximum 4 process modules
　Heptagon: maximum 5 process modules

［Available process modules］
　Sputtering, etching, ashing, PE-CVD and others (manufactured by ULVAC)

System photo

uGmni-200, シャッフルカジノ トークンingle-wafer film deposition and etching system for advanced electronics manufacturing

System configurations

A variety of modules can be equipped, examples below.

*Certain combinations may be unavailable depending on the process, so please consult with us.

Product

uGmni-シャッフルカジノ 評判 single-wafer film deposition シャッフルカジノ 評判rocessing system

For further information

ULVAC, Inc. elec_info
Advanced Electronics Equipment Division　TEL:+81-467-89-2139