ULVAC, Inc. has started accepting orders for the ENTRON-EXX, a new multi-chamber deposition system for semiconductor applications. The ENTRON-EXX builds on the proven productivity and flexibility of its predecessor, the ENTRON-EX W300, while offering enhanced data intelligence and expandability.
After building on the proven productivity and flexibility of the widely adopted predecessor model that was first released in 2005, we developed the ENTRON-EXX. The ENTRON-EXX is a cutting-edge platform designed to meet the evolving needs of increasingly advanced and complex semiconductor manufacturing processes. This next-generation system takes performance to new heights. With its flexibility, enhanced data collection and analysis capabilities and a highly scalable design, the ENTRON-EXX empowers the future of semiconductor innovation.
1. Maximizing Factory Space Efficiency:
Maximizing factory space efficiency is the key to boosting productivity, and flexibility is the solution. The ENTRON-EXX offers two versatile platform options, Single and Tandem[1], enabling customers to select the best platform to fit their factory spaces, thereby achieving maximum productivity per unit of space.
2. Enhanced Data Collection and Analysis Capabilities:
To meet the demands of increasingly complex semiconductor manufacturing, the ENTRON-EXX significantly enhances its data collection and analysis capabilities. With real-time processing of large data volumes, it empowers customers to improve yields, optimize preventative maintenance, and enhance overall operational efficiency.
3. Highly Expandable System Design:
The ENTRON-EXX features a highly expandable design, enabling quick module additions and swapping. This system can seamlessly adapt to evolving needs, providing customers with an optimized environment for both development and mass production.
ULVAC, as a "Field of Potentiality for the Future[2]," is committed to pioneering advances in the semiconductor industry through its innovative application of vacuum technology.
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