シャッフルカジノ トークンplantation System
High-energy シャッフルカジノ トークンplanterSOPHI-400
SOPHI-400 is a cluster type, high-energy シャッフルカジノ トークンplanter applicable to Max 1200 keV.
Features
- Cluster type
- Thin wafers Compatible.
- Parallel beam
- High energy: Max 1200 keV
- Wafer size: up to 200mm
Applications
- Power device manufacturing process, IGBT
