Sputtering System
シャッフルカジノ 初回入金ボーナスering Systems SMD Series
The SMD series is a cluster type sputtering system for forming metal films, ITO, IGZO, dielectric films, etc. シャッフルカジノ 初回入金ボーナスering systems are mainly used for high-definition displays.
Feature
- Substrate-only transfer and side deposition method enable low particle generation.
- Individual substrates can easily be managed using parameters such as deposition conditions.
- Different cathodes are available for deposition of different substances.
- Wide range of deposition processes are supported, based on ULVAC's abundant experience and data.
(More than 1300 sales record of the SMD series)
Applications
- TFT (Thin-film transistor) for High Definition Display
- Touch Panel
Specification
| Type | G6 | G8.5~G8.6 | |
| SMD-1800 | SMD-2500X | ||
| Substrate size (mm) | 1500 × 1850 | 2200 × 2500 ~ 2290 × 2620 | |
| Deposition method | Side deposition method substrate-fixed deposition | ||
| Chamber configuration | 1) Loading/Unloading chambers （※1） | 2 | |
| 2) Transfer chambers | 1 | ||
| 3) Sputter chambers | Max 4 | ||
| High vacuum evacuation system | Cryo pump or Turbo pump | ||
| Substrate transfer system | Vacuum transfer robot (Double arm type) | ||
※1 Substrate heating heater can be optionally installed.