Vacuum Furnace
シャッフルカジノ ベガウォレット
シャッフルカジノ ベガウォレット
Vacuum Heat Treatment FurnaceFHHn series
FHH series are used for various purposes, such as tempering, sintering, brazing of various types of metal.
Features
- Adopting シャッフルカジノ ベガウォレット carry system, chamber configuration can be multiplied by combining each unitized chambers.
- System configuration is selectable depending on process and throughput, such as preparation chamber（vacuum／atmosphere），preheating chamber（operation 500ºC），heating chamber（operation 1150ºC）, cooling chamber.
- Adopting double gate valve, each chamber is completely isolated. A vacuum/atmosphere is completely isolated.
- Units can be added depending on process and throughput.
- Inline process is possible, as below.“Loading→Heating 1→Cooling 1→Heating 2→Cooling 2→Unloading”.
- Adopting six sectional temperature control system heater（option）, temperature uniformity can be 1150ºC±3ºC.
Applications
- Vacuum heat treatment : Heat treatment of various metals, brazing.
- Sintering : Magnet.
Specifications
| System / Type | 3060 | 6090 | 6150 | Remarks | ||
| Performance | ||||||
| Size | Uniform hot zone (㎜) | Width | 300 | 600 | 600 | |
| Length | 600 | 900 | 1500 | |||
| Height | 500 | 600 | 600 | |||
| Loading capacity (㎏) | 230 | 500 | 800 | including tray's weight | ||
| Temperature | Max. temperature | Preheating | 600ºC | |||
| Heating | 1200ºC | |||||
| Operation temperature | Preheating | 500ºC | ||||
| Heating | 1100ºC | |||||
| Temperature uniformity | Preheating | 500±5ºC | Five points measurement at no load | |||
| Heating | 1100±5ºC | |||||
| Heating (special) | 1100±3ºC | High temperature type is optional |
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| Cooling | Gas cooling | Standard | 80kPaG | selectable Ar.N2 | ||
| Pressurized type | 190kPaG | |||||
| Vacuum | Ultimate vacuum | Standard | 10-1Pa order | At degassed and empty conditions | ||
| High vacuum type | 10-3Paorder | |||||
| Operation pressure | Standard(1) | 1Pa〜10Pa | (1) At low vacuum mode
(2)At carrier gas mode |
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| Standard(2) | 10Pa to 100Pa | |||||
| High vacuum type | 10-2Pa to10-1Pa | |||||
| Pump-down time (min) |
Loading | 10min or less | from atmosphere to 10Pa or less at no load | |||
| Cooling | 10min or less | |||||
| Cooling | 10min or less | |||||
| Leak rate (Pa･m3/s) |
Loading | 4×10-4or less | by pressure rise method | |||
| Preheating | 4×10-4or less | |||||
| Heating | 2×10-4or less | |||||
| Cooling | 4×10-4or less | |||||
| Utility | ||||||
| 3chambers type (Preheating×1 Heating×1 Cooling×1) |
Power requirement (kVA) | 210 | 300 | 480 | Primary power requirement | |
| Cooling water requirement (m3/hr) | 12 | 15 | 18 | Temperature:20 to 30ºC | ||
| Compressed air requirement (Nm3/min) | 1000 | 1100 | 1100 | |||
| Carrier gas requirement (L/min) | 80 | 80 | 200 | Limit of flowmeter | ||
| Coling gas requirement (m3/times) | 4 | 9 | 12 | At the condition of pressurized cooling (190kPa) | ||
| Floor space requirement (m2) | Width | 8.5 | 10 | 12 | ||
| Length | 8.5 | 10 | 13 | |||
| Height | 4.5 | 5.8 | 5.8 | |||
| 5chambers type (Preheating×2 Heating×2 Cooling×1) |
Power requirement (kVA) | 390 | 425 | 750 | Primary power requirement | |
| Cooling waterrequirement (m3/hr) | 20 | 25 | 30 | Temperature:20 to 30ºC | ||
| Compressed air requirement(Nm3/min) | 1000 | 1100 | 1100 | |||
| Carrier gas requirement (L/min) | 120 | 160 | 300 | Limit of flowmeter | ||
| Coling gas requirement (m3/times) | 4 | 9 | 11.7 | At the condition of pressurized cooling (190kPa) | ||
| Floor space requirement (m2) | Width | 8.5 | 10 | 12 | ||
| Length | 11.5 | 12.5 | 17.5 | |||
| Height | 4.5 | 5.8 | 5.8 | |||